Ultra-high performance electron beam lithography system
| Make/model | RAITH, EBPG 5200 plus |
|---|---|
| Details | A 100kV ultra-high-performance electron beam lithography system suitable for nanoscale writing at frequencies up to 125MHz. |
| Facility | Institute for Compound Semiconductors |
| School | School of Physics and Astronomy |
Get in touch
Institute for Compound Semiconductors (ICS)
Location
Translational Research Hub
Maindy Road
Cathays
CF24 4HQ
Maindy Road
Cathays
CF24 4HQ