Reactive Ion etcher
| Make/model | Reactive Ion Etching |
|---|---|
| Details | Uses 5 different gases: SF6, Ar, O2, CHF3 and Cl2 |
| Facility | |
| School | School of Engineering |
Get in touch
Dr Emmanuel Brousseau
- brousseaue@cardiff.ac.uk
- +44 (0)29 2087 5752
Location
Queen's Buildings
5 The Parade
Newport Road
CF24 3AA
5 The Parade
Newport Road
CF24 3AA