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Chemical Mechanical Planarization system

Chemical Mechanical Planarization system for polishing diamond etc, wafers up to 4".

Make/model Logitech CMP Tribo
Details Chemical Mechanical Planarization system for polishing diamond etc, wafers up to 4".
Facility Cardiff Diamond Foundry
School School of Physics and Astronomy

Get in touch

Professor Oliver Williams

Email
williamso@cardiff.ac.uk
Telephone
+44 (0)29 2087 4978

Location

Queen's Buildings
5 The Parade
Newport Road
CF24 3AA