Atomic Layer Deposition (ALD)
| Make/model | Beneq, ALD, Thin Film System TFS200* |
|---|---|
| Details | ALD deposition of TiO2, TiN, Ta2O5, Al2O3, ZnO, SiO2, SiN, NiO, ITO, MoO. |
| Facility | Institute for Compound Semiconductors |
| School | School of Physics and Astronomy |
Get in touch
Saleem Shabbir
Location
Translational Research Hub
Maindy Road
Cathays
CF24 4HQ
Maindy Road
Cathays
CF24 4HQ