Reactive Ion etcher
| Brand/model | Reactive Ion Etching |
|---|---|
| Manylion | Uses 5 different gases: SF6, Ar, O2, CHF3 and Cl2 |
| Cyfleuster | |
| Ysgol | Yr Ysgol Peirianneg |
Cysylltwch
Dr Emmanuel Brousseau
- brousseaue@cardiff.ac.uk
- +44 (0)29 2087 5752
Lleoliad
Queen's Buildings
5 The Parade
Heol Casnewydd
CF24 3AA
5 The Parade
Heol Casnewydd
CF24 3AA